Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE
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Description
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLEWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
weekly and regular control
by testing with a single specified load applied to the stylus to assess compliance with a particular specification
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g) liberated gases
3 Dimensions
This Part of this European Standard specifies requirements for firing systems for oil and gaseous fuels applicable to shell boilers
Basic principles and uncertainties
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Constructional requirements
a) users with an application independent generic cabling system and an open market for cabling components
13 Safety in use
detection and suppression systems
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